109111-30-0
(trifluoromethyl)bis(dimethylamino)silane
→
~80%
109111-29-7
trichloro(trifluoromethyl)silane
75-63-8
三氟溴甲烷
~48%
10026-04-7
四氯硅烷
+
334-93-0
trifluoro methyllithium
2314-97-8
三氟碘甲烷
75-72-9
氟里昂-13
7440-21-3
单质硅