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Section 1: Product Identification
   Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder
   Chemical Name:
   (96-1070) for CVD/ALD
   CAS Registry Number:       175923-04-3    
   Formula:       Zr[N(CH3)(CH2CH3)]4    
   EINECS Number:       none    
   Chemical Family:       metal amide complex    
   Synonym:       Zirconium(IV) ethylmethylamide; Zirconium-tetrakis-ethylmethylamide    

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Section 2: Composition and Information on Ingredients
   Ingredient       CAS Number       Percent       ACGIH (TWA)       OSHA (PEL)    
   Title compound       175923-04-3       100%       5mg/m3 (as Zr)       5mg/m3 (as Zr)    

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Section 3: Hazards Identification
   Emergency Overview:       Material is extremely irritating to skin, eyes and respiratory tract.    
   Primary Routes of Exposure:       Ingestion, inhalation of dust and vapor    
   Eye Contact:       Causes severe irritation to the eyes.    
   Skin Contact:       Causes severe irritation to the skin.    
   Inhalation:       Causes irritation to the nose, mucous membranes and respiratory tract.    
   Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness
   Ingestion:
   and convulsions.
   Acute Health Affects:       Causes severe irritation to the skin, eyes and respiratory tract. May be harmful if swallowed or inhaled.    
   No information on long-term chronic effects. Repeated or prolonged exposure of the skin may cause
   Chronic Health Affects:
   dermatitis.
   NTP:       No    
   IARC:       No    
   OSHA:       No    

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SECTION 4: First Aid Measures
   Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
   Eye Exposure:
   assistance in keeping their eye lids open. Get immediate medical attention.
   Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
   Skin Exposure:
   irritation persists.
   Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
   Inhalation:
   in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
   Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
   Ingestion:
   vomiting only if directed by medical personnel.

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SECTION 5: Fire Fighting Measures
   Flash Point:       no data    
   Autoignition Temperature:       no data    
   Explosion Limits:       no data    
   Extinguishing Medium:       carbon dioxide, foam or dry powder    
   If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure
   Special Fire Fighting Procedures:
   self-contained breathing apparatus and full protective clothing.
   Hazardous Combustion and       If involved in a fire, this material may emit toxic and corrosive fumes.    
   Decomposion Products:
   Unusual Fire or Explosion Hazards: Highly flammable. Releases flammable gas in contact with water.

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SECTION 6: Accidental Release Measures
   Eliminate all ignition sources and ensure adequate ventilation. Small spills can be mixed with vermiculite,
   Spill and Leak Procedures:
   sodium carbonate or other suitable non-combustible adsorbent and swept up.

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SECTION 7: Handling and Storage
   Store the material in a tightly sealed container under an inert atmosphere of nitrogen or argon. Keep away
   Handling and Storage:
   from heat and direct sunlight.

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SECTION 8: Exposure Controls and Personal Protection
   Eye Protection:       Always wear approved safety glasses when handling a chemical substance in the laboratory.    
   Skin Protection:       Wear protective clothing and gloves.    
   Ventilation:       Handle the material in an efficient fume hood.    
   If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
   Respirator:
   Protection Program to be in compliance with 29 CFR 1910.134.
   Ventilation:       Handle the material in an efficient fume hood.    
   Additional Protection:       No additional protection required.    

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SECTION 9: Physical and Chemical Properties
   Color and Form:       light yellow liq.    
   Molecular Weight:       323.63    
   Melting Point:       not applicable    
   Boiling Point:       81°C /0.1mm    
   Vapor Pressure:       no data    
   Specific Gravity:       1.049    
   Odor:       slight amine odor    
   Solubility in Water:       reacts with water    

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SECTION 10: Stability and Reactivity
   Stability:       moisture sensitive    
   Hazardous Polymerization:       no hazardous polymerization    
   Conditions to Avoid:       contact with water    
   Incompatibility:       Water, mineral acids, halogens and oxidizing agents    
   Decomposition Products:       Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide.    

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SECTION 11: Toxicological Information
   RTECS Data:       No information available from the RTECS files.    
   Carcinogenic Effects:       no data    
   Mutagenic Effects:       no data    
   Tetratogenic Effects:       no data    

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SECTION 12: Ecological Information
   Ecological Information:       No information available.    

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SECTION 13: Disposal Considerations
   Disposal:       Dispose of this material according to local, state and federal regulations.    

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SECTION 14: Transportation
   Shipping Name (CFR):       Organometallic substance, Liquid, Water-reactive,Flammable    
   Hazard Class (CFR):       4.3    
   Additional Hazard Class (CFR):       3    
   Packaging Group (CFR):       II    
   UN ID Number (CFR):       UN# 3399    
   Shipping Name (IATA):       Organometallic substance, Liquid,Water-reactive,Flammable    
   Hazard Class (IATA):       4.3    
   Additional Hazard Class (IATA):       3    
   Packaging Group (IATA):       II    
   UN ID Number (IATA):       UN# 3399    

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SECTION 15: Regulatory Information
   TSCA:       Not listed in the TSCA inventory    
   SARA (Title 313):       Title compound not listed    
   Second Ingredient:       none    

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SECTION 16 - ADDITIONAL INFORMATION
N/A