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Section 1: Product Identification
   Chemical Name:       Trimethylsilane, 97%    
   CAS Registry Number:       993-07-7    
   Formula:       (CH3)3SiH    
   EINECS Number:       213-603-0    
   Chemical Family:       organosilicon compounds    
   Synonym:       Silane, trimethyl    

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Section 2: Composition and Information on Ingredients
   Ingredient       CAS Number       Percent       ACGIH (TWA)       OSHA (PEL)    
   Title Compound       993-07-7       100%       no data       no data    

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Section 3: Hazards Identification
   Emergency Overview:       May be irritating to skin, eyes, and respiratory tract.    
   Primary Routes of Exposure:       Inhalation, skin, eyes.    
   Eye Contact:       May cause moderate irritation of the eyes.    
   Skin Contact:       May cause slight to mild irritation of the skin.    
   May cause irritation to the nose, mucous membranes and respiratory tract. May be harmful through inhalation.
   Inhalation:
   Ingestion:       No specific information is available on the physiological effects of ingestion.    
   Acute Health Affects:       May be irritating to skin, eyes and mucous membranes. May be harmful through inhalation.    
   Chronic Health Affects:       No information available on long-term chronic effects.    
   NTP:       No    
   IARC:       No    
   OSHA:       No    

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SECTION 4: First Aid Measures
   Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
   Eye Exposure:
   assistance in keeping their eye lids open. Get immediate medical attention.
   Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
   Skin Exposure:
   irritation persists.
   Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
   Inhalation:
   in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
   Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
   Ingestion:
   vomiting only if directed by medical personnel.

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SECTION 5: Fire Fighting Measures
   Flash Point:       <-4°F    
   Autoignition Temperature:       no data    
   Explosion Limits:       no data    
   Extinguishing Medium:       carbon dioxide or dry powder    
   Fire fighters should be equipped with a NIOSH approved positive pressure self-contained breathing apparatus
   Special Fire Fighting Procedures:
   and full protective clothing.
   Hazardous Combustion and       Burning material may emit toxic and corrosive fumes.    
   Decomposion Products:
   Unusual Fire or Explosion Hazards: Highly flammable. Material readily ignited with flames, sparks, friction or heat.

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SECTION 6: Accidental Release Measures
   The material will evaporate rapidly at room temperature. Leave the area unless fitted with a self-contained
   Spill and Leak Procedures:       breathing apparatus or until the vapors have dispersed. Larger spills can be absorbed into vermiculite or other    
   suitable noncombustible adsorbent. Sweep up the material and dispose of properly.

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SECTION 7: Handling and Storage
   Handling and Storage:       The material is stored in steel cylinder.    

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SECTION 8: Exposure Controls and Personal Protection
   Eye Protection:       Always wear approved safety glasses when handling a chemical substance in the laboratory.    
   Skin Protection:       Wear protective clothing and gloves. Consult with glove manufacturer to determine the proper type of glove.    
   Ventilation:       Handle the material in an efficient fume hood.    
   If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
   Respirator:
   Protection Program to be in compliance with 29 CFR 1910.134.
   Ventilation:       Handle the material in an efficient fume hood.    
   Additional Protection:       No additional protection required.    

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SECTION 9: Physical and Chemical Properties
   Color and Form:       gas    
   Molecular Weight:       74.2    
   Melting Point:       -135.9°    
   Boiling Point:       6.7°C    
   Vapor Pressure:       no data    
   Specific Gravity:       0.638 (6.7°)    
   Odor:       not determined    
   Solubility in Water:       insoluble    

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SECTION 10: Stability and Reactivity
   Stability:       air and moisture stable    
   Hazardous Polymerization:       no hazardous polymerization    
   Conditions to Avoid:       contact with heat or ignition sources.    
   Incompatibility:       Strong oxidizing agents and halogens    
   Decomposition Products:       carbon monoxide, carbon dioxide, silicon dioxide, and organic fumes.    

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SECTION 11: Toxicological Information
   RTECS Data:       No information available in the RTECS files.    
   Carcinogenic Effects:       No data available    
   Mutagenic Effects:       No data available    
   Tetratogenic Effects:       No data available    

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SECTION 12: Ecological Information
   Ecological Information:       No information available    

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SECTION 13: Disposal Considerations
   Disposal:       Dispose of according to federal, state, and local regulations.    

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SECTION 14: Transportation
   Shipping Name (CFR):       Liquefied Gas, Flammable, N.O.S.    
   Hazard Class (CFR):       2.1    
   Additional Hazard Class (CFR):       NA    
   Packaging Group (CFR):       NA    
   UN ID Number (CFR):       UN# 3161    
   Shipping Name (IATA):       Liquefied Gas, Flammable, N.O.S.    
   Hazard Class (IATA):       2.1    
   Additional Hazard Class (IATA):       NA    
   Packaging Group (IATA):       NA    
   UN ID Number (IATA):       UN# 3161    

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SECTION 15: Regulatory Information
   TSCA:       Listed in the TSCA inventory.    
   SARA (Title 313):       Title compound not listed.    
   Second Ingredient:       none    

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SECTION 16 - ADDITIONAL INFORMATION
N/A