141-62-8
十甲基四硅氧烷
→
~8%
420-56-4
三甲基氟硅烷
+
353-66-2
二氟二甲基硅烷
107-51-7
八甲基三硅氧烷
56998-70-0
fluoro-dimethyl-trimethylsilyloxysilane
812-20-4
monofluorpentamethyldisilan