542-91-6
二乙基硅烷
→
358-06-5
diethyl(difluoro)silane
+
686-70-4
diethyl(fluoro)silane
1609-19-4
二乙基一氯一氢硅烷
590-57-8
[diethyl(fluoro)silyl]oxy-diethyl-fluorosilane